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150 e MaskversusMark 8

SUSS MicroTec 150 e Mask, Tokyo Electron Mark 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
Mark 8Tokyo Electron
OEMSUSS MicroTecTokyo Electron
CategoryLithographyLithography
Wafer size—Parallel wafer flow processing software option (simultaneous coat & develop)
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1992 Vintage · 1993 Vintage · 1996 Vintage · 1998 Vintage
Control system——
Generation——
FamilySUSS MicroTec 150 e MaskTokyo Electron Mark
Cited variants—
  • Tel Mark 8 Developer[1]
  • Tel Mark 8 Coater[2]
  • Tel MARK 8[3]
  • Mark 8 Developer[1]
  • Mark 8 Coater[2]
  • Mark 8[4]
  • Mark 8 Coater (6 inch)[2]
  • Mark 8 Coater (8 inch)[5]
  • Mark 8 SOGT[3]
  • Mark 8 Coater/Developer[4]
Specifications
Configuration—SOGT[3]
Wafer size—Parallel wafer flow processing software option (simultaneous coat & develop)[4]
Wafer Size—6 inch, 8 inch[1]
Configurations—Developer, Coater, Coater/Developer[1]
Vintages—1992, 1993, 1996, 1998[2]
Coater/Developer Configuration Details—2 coater / 2 developer - Cassette platforms (4) - Coat Modules (2) - Hot Plates (8) - Chill Plates (9) - Wash Disk system (WDS) - A two block system / two robots - Parallel wafer flow processing software option (simultaneous coat & develop) - Semifab CD 200+4TEL Temperature & Humidity Unit - Chemical cabinet containing SMC INR-244-117B Thermocons[4]
Make—Tel[4]
Model—Mark 8[4]
Wafer sizes—6 inch[2]
Cassette platforms—4[4]
Coat modules—2[4]
Hot plates—8[4]
Chill plates—9[4]
Wash disk system—WDS[4]
Robots—2[4]
Software option—Parallel wafer flow processing software option (simultaneous coat & develop)[4]
Temperature & humidity unit—Semifab CD 200+4TEL Temperature & Humidity Unit[4]
Chemical cabinet contents—SMC INR-244-117B Thermocons[4]
Bulk developer chemical mix station—Available for this system[4]
150 e Mask entryMark 8 entryAsk about these tools →Share experience with this comparison →

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing