Comparison ledger
Semitool EQ 222 SR Spray Solvent, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EQ 222 SR Spray SolventSemitool | 1000PYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool EQ 222 SR Spray Solvent | YES 1000P |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 5 Wire[1] | Parallel plate[4] |
| Voltage | 208 V[1] | — |
| Make | Semitool[1] | — |
| Model | EQ 222 SR[1] | 1000P[3] |
| Product type | Spray Solvent Tool (SST)[1] | — |
| Electrical configuration | 3 Phase, 5 Wire, 208 V[1] | — |
| Frequency (one unit) | 50/60 Hz[2] | — |
| Vintage (some units) | 1998[1] | — |
| Vintage (one unit) | 1997[2] | — |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →