Waferpedia

Comparison ledger

OFL 11versus100R16

Seiko Epson OFL 11, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OFL 11Seiko Epson
100R16Strasbaugh
OEMSeiko EpsonStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySeiko Epson OFL 11Strasbaugh 100R16
Specifications
type—1 spindle grinder/polisher[1]
drive system—DC drive system with 2 motors[1]
spindle RPM—1-180 RPM[1]
eccentric RPM—1-90 RPM[1]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[1]
capacity—16 inches[1]
spindle size—1-8 TPI[1]
overall dimensions—28 inches x 36 inches x 48 inches[1]
weight—500 lbs[1]
origin—made in the USA[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com