Waferpedia

Comparison ledger

SCP 9400 Batch Wafer Processingversus11600 SRD

Santa Clara Plastics SCP 9400 Batch Wafer Processing, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMSanta Clara PlasticsSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySanta Clara Plastics SCPSemitool 11600 SRD
Specifications
ConfigurationRCA Clean[1]Ceramic[2]
Manufacturer—Semitool[2]
Model—11600 SRD[2]
Equipment type—Spin Rinse Dryer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing