Waferpedia

Comparison ledger

Q 7000 MaskversusMA 8 BA 8 Gen 5 S Compact Mask

Quintel Q 7000 Mask, SUSS MicroTec MA 8 BA 8 Gen 5 S Compact Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Lithography, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
OEMQuintelSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyQuintel Q 7000 MaskSUSS MicroTec MA 8 Mask
Cited variants—
  • MA 8 / BA 8 Gen 5 SGen 5 S[2]
Specifications
Configurationcomplete with Optek QTL2001 optics and IR illumination package[1]For imprint processing[2]
Power supply—3x 400V AC + N + PE / 50-60Hz[2]
Max fuse rating machine—30amp[2]
Max fuse rating facility—40amp[2]
Connection cable—5x AWG8 length 16ft / 5m open end, no connector[2]
Outer tube diameter—6mm[2]
Max length—2m[2]
According to purity level ISO 8573-1—2010, [5:6:4][2]
CDA Consumption—ca. 1 m3/h (LH350)[2]
AIC or main interrupt and breakers—15 kA IEC[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing