Waferpedia

Comparison ledger

Q 4000 Maskversus1000 Family

Quintel Q 4000 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMQuintelUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyQuintel Q 4000 MaskUltratech 1000 Family
Specifications
ConfigurationQuintel Power Supply 365-405nm source; bottom shelve right side.[1]—
Equipment typeMask aligner[1]—
Power supply source365-405nm source[1]—
Mask holderFixed[1]—
Split field objectivesWith zoom capabilities[1]—
Head lift exposure sourceWith zoom objectives[1]—
Illumination control panel and vacuum/separation pressure gaugeLeft side[1]—
Joy stick 1Mask viewing manipulator; left side[1]—
Joy stick 2Substrate manipulator; right side[1]—
Theta substrate adjustorLeft side[1]—
Objective focus switch / coarse align / contact separation buttonRight side[1]—
Parameter control display panelRight side[1]—
Power on switchRight side[1]—
Tool type—Photolithography step-and-repeat 1X stepper[2]
Optical design—Wynne Dyson[2]
Magnification—1X[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]en.wikipedia.orgen.wikipedia.org