Waferpedia

Comparison ledger

1050 UV-VISversusNewview 5000 White Light

Perkin Elmer 1050 UV-VIS, Zygo Newview 5000 White Light, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1050 UV-VISPerkin Elmer
OEMPerkin ElmerZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPerkin Elmer 1050 UV-VIS—
Specifications
Asset ID82948[1]—
Last Confirm DateAugust 23, 2024[1]—
ManufacturerPerkin Elmer[1]—
Model1050[1]—
Instrument typeSpectrometer[1]—
UseAnalyzing ultraviolet and visible light absorption spectra[1]—
Tool type—Non-contact 3D surface profiler[2]
Measurement method—Scanning white light interferometry[2]
Objectives—5x, 10x, 50x[2]
Vertical resolution—0.1-20nm (FDA resolution setting dependent)[2]
Lateral resolution range—0.64-2.6μm (objective dependent)[2]
Max vertical step height—5mm[2]
Vertical scan rate—≤ 10μm/sec[2]
Sample type—Opaque and transparent surfaces[2]
Max roughness—≤ 100μm Rp[2]
Reflectivity—4-100%[2]
Max sample thickness—104mm[2]
Objective working distances—5x = 9.3mm; 10x = 7.4mm; 50x = 3.4mm[3]

Plan your fab

Building a Precision Optics process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu
  3. [3]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu