Comparison ledger
Oxford Instruments Plasmalab 100 ICP 180 RIE, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Plasmalab 100 ICP 180 RIEOxford Instruments | 1512eTegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments Plasmalab 100 | Tegal 1512e |
| Specifications | ||
| Voltage | 208V, 50/60Hz[1] | — |
| Configuration | With VAT PM-5 Adaptive Pressure Controller[1] | — |
| Manufacturer | Oxford Instruments[1] | — |
| Model | Plasmalab 100 ICP 180[1] | — |
| Tool type | Reactive Ion Etcher[1] | Industrial RIE plasma etcher system[3] |
| Category | Etch[2] | — |
| Wafer size | 6 inch[1] | — |
| Power | 208V, 50/60Hz[1] | — |
| Adaptive pressure controller | VAT PM-5[1] | — |
| Turbopump controller | Adixen ACT 1300M[1] | — |
| Vacuum pump | Leybold D65BCS with oil filter and exhaust filter[1] | — |
| Gas delivery | Gas Box[1] | — |
| Control computer | Control Computer (no HDD)[1] | — |
| Monitor | LCD Monitor[1] | — |
| Chiller | Thermo Neslab Chiller[1] | — |
| Computer cart | Computer Cart[1] | — |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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