Comparison ledger
Oxford Instruments CKX 1000 Ion Beam, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CKX 1000 Ion BeamOxford Instruments | 1512eTegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments CKX 1000 Ion Beam | Tegal 1512e |
| Specifications | ||
| Configuration | Includes Turbo molecular pump & Edwards backing pump[1] | — |
| Manufacturer | Oxford Instruments[2] | — |
| Model | CKX 1000 Ion Beam[1] | — |
| Category | Etch[2] | — |
| Ion source | 11 cm ion source[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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