Comparison ledger
Oxford Instruments 100 ICP Fluorine, Veeco Nexus IBE350, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | Nexus IBE350Veeco |
|---|---|---|
| OEM | Oxford Instruments | Veeco |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | Veeco Nexus IBE350 |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | — |
| Etch type | — | Broad-beam ion etcher[2] |
| Ion source | — | 350 mm diameter Argon ion source with RF plasma generator[2] |
| RF plasma generator frequency | — | 1.8 MHz[2] |
| RF plasma generator maximum power | — | 2 kW[2] |
| Energy range | — | 50 V to 800 V[2] |
| Operating pressure | — | 10^-4 mbar[2] |
| Base pressure | — | 10^-7 mbar[2] |
| Ion beam width | — | 350 mm[2] |
| Ion optics | — | Three-grids collimation optics system with molybdenum electrostatic apertures[2] |
| Charge neutralizer | — | Electron-emitting neutralizer downstream from the ion optics[2] |
| Substrate temperature | — | Less than 90 °C[2] |
| Substrate rotation | — | Up to 10 rpm[2] |
| Substrate tilt angle | — | +90° to -70°[2] |
| Tilt angle control | — | ±0.5°[2] |
| Endpoint detection | — | Secondary Ions Mass Spectroscopy (SIMS) system[2] |
| Process type | — | Ion beam etching (physical sputtering)[2] |
| RF generator frequency | — | 1.8 MHz[2] |
| RF generator power | — | 2 kW maximum[2] |
| Beam energy range | — | 50 V to 800 V[2] |
| Substrate fixture temperature | — | Less than 90 °C (Veeco FlowCool)[2] |
| Substrate rotation speed | — | Up to 10 rpm[2] |
| Substrate tilt angle range | — | +90° to -70° with ±0.5° accuracy[2] |
| Mechanical shutter | — | Present downstream of grids optics[2] |
| Tool type | — | Broad-beam ion etcher[2] |
| RF frequency | — | 1.8 MHz[2] |
| RF power | — | 2 kW maximum[2] |
| Ion energy range | — | 50 V to 800 V[2] |
| Ion beam diameter | — | 350 mm[2] |
| Collimation optics | — | Three-grids collimation optics system[2] |
| Charge neutralization | — | Plasma Bridge Neutralizer downstream from the ion optics[2] |
| Fixture rotation speed | — | Up to 10 rpm[2] |
| Fixture tilt range | — | +90° to -70°[2] |
| Fixture tilt control | — | Accurate control +/-0.5°[2] |
| Ion source type | — | ICP source, 350mm diameter, RF plasma generator, 1.8MHz, 2kW maximum[2] |
| Grid system | — | Three-grids collimation optics system (molybdenum electrostatic apertures)[2] |
| Neutralizer type | — | Plasma Bridge Neutralizer (PBN)[2] |
| Cooling system | — | Veeco patented flowcool system[2] |
| Process gas | — | argon[2] |
| Beam collimation optics | — | three-grids collimation optics system[2] |
| Fixture tilt angle | — | +90° to -70°[2] |
| SIMS endpoint detection | — | included[2] |
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