Waferpedia

Comparison ledger

DSS 200 Synergyversus11600 SRD

Ontrak DSS 200 Synergy, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMOntrakSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOntrak DSS 200Semitool 11600 SRD
Specifications
Voltage100 VAC[1]—
Breaker Size20 A[1]—
Rating of Largest Load8 A[1]—
Frequency50 Hz[1]—
Full Load Current14 A[1]—
ConfigurationSingle Phase[1]Ceramic[3]
ProcessOxide[2]—
Vintage1997[1]—
PhaseSingle Phase[1]—
Manufacturer—Semitool[3]
Model—11600 SRD[3]
Equipment type—Spin Rinse Dryer[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing