Waferpedia

Comparison ledger

0020 Contour ProjectorversusMicroLUPI

OGP 0020 Contour Projector, Zygo MicroLUPI, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMOGPZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOGP (Optical Gaging Products) 0020 Contour ProjectorZygo MicroLUPI
Specifications
Configuration50-60 Cycle[1]optic output[2]
Voltage115 V[1]—
Laser—Type: frequency stabilized Helium-Neon laser with fiber[2]
Wavelength—1550 nanometers[2]
Maximum Output Power—<1 milliwatt[2]
Output Power at Instrument Aperture—≤1 milliwatt[2]
Test Beam Diameter—3 mm[2]
Coherence Length—≥10 meters[2]
Mounting—Dovetail[2]
Type—Infinity Corrected SLWD Mag. N.A. Working Dist.[2]
Motor—DC brushless, microstepper[2]
Drive—leadscrew[2]
Range—6 in. (152 mm)[2]
Resolution—4 μin. (0.1 μm)[2]
Maximum Velocity—0.50 in/sec (12.7 mm/sec)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing