Comparison ledger
OAI 800, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 800OAI | 1000 FamilyUltratech |
|---|---|---|
| OEM | OAI | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | OAI 800 | Ultratech 1000 Family |
| Specifications | ||
| Tool type | Aligner[1] | Photolithography step-and-repeat 1X stepper[3] |
| Equipment section | Lithography[1] | — |
| Tool name | OAI 800[2] | — |
| Serial number | 1398[2] | — |
| Align type | Backside[2] | — |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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