Comparison ledger
Nordson March AP 1000, SPTS CPX Pegasus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | March AP 1000Nordson | CPX PegasusSPTS |
|---|---|---|
| OEM | Nordson | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nordson March | SPTS CPX Pegasus |
| Specifications | ||
| Frequency | 50 Hz[1] | 60Hz[5] |
| CB Current | 25 A[1] | — |
| SCCR | 10 kA[1] | — |
| Configuration | Includes vacuum pump & RF generator[2] | 2 Chambers[5] |
| RF Generator Power (optional) | 600 W or 1000 W (Seren, 13.6 MHz)[3] | — |
| Vacuum Pump | Included (dry or wet pump options)[4] | — |
| Power | 50 Hz[2] | — |
| Vacuum | Included (dry or wet pump options)[2] | — |
| RF Generator Power | 600 W or 1000 W (Seren, 13.6 MHz)[2] | — |
| Source RF Generator | — | MKS 6.5 kw RF Power Generator[5] |
| Platen RF Generator | — | MKS/ENI ACG 3B 13.56MHz RF Generator[5] |
| Rotary Pump | — | 3 PCS[5] |
| Turbo pump | — | 2 PCS[5] |
| DI Water | — | SMC HRZ-L2-DY chiller[5] |
| Silicon oil | — | SMC HRZL-D chiller[5] |
| Manufacturer | — | SPTS / STS (also listed under KLA / SPTS)[5] |
| Wafer Size | — | 8 inch (200 mm)[5] |
| Wafer Size (alternate) | — | 200 mm[6] |
| Number of Chambers | — | 2[5] |
| Voltage | — | 380 Volts[5] |
| Voltage (alternate) | — | 400 Volts[6] |
| Current | — | 160 Amps[5] |
| RF Source Generator | — | MKS 6.5 kW RF Power Generator[5] |
| RF Platen Generator | — | MKS/ENI ACG 3B 13.56MHz RF Generator[5] |
| Rotary Pump Quantity | — | 3 PCS[5] |
| Turbo Pump Quantity | — | 2 PCS[5] |
| Pressure System Components | — | MKS Baratron gauge (10-4~10-1 m Torr), MKS 750 capacitance (10-760 Torr), BOC EDWARDS Active gauge (10-4mTorr~10Torr), ESC (ceramic)[5] |
| Gases Supported | — | SF6, C4F8, O2, N2, Ar[5] |
| Gas Flow Rates | — | C4F8 400 sccm, SF6 1200 sccm, Ar 500 sccm, O2 200 sccm[5] |
| Wafer Handling Robot | — | Brooks MagnaTran 7[5] |
| Cooling/Heating Systems | — | House Water, DI Water chiller (SMC HRZ-L2-DY), Silicon oil chiller (SMC HRZL-D), Insert Heaters[5] |
| Platform | — | CPX[6] |
| Module | — | Pegasus[6] |
| Database Version | — | 4.16[6] |
| Installation Type | — | Thru-Wall[6] |
| Wafer Flat Orientation | — | Round with notch[6] |
| Clamp Type | — | TDESC[6] |
| MFCs | — | MKS[6] |
| Pump Type | — | EDWARDS[6] |
| Cluster Transfer Pump | — | ALCATEL[6] |
| Dry Pumps | — | 1-DS80, 2-DS700[7] |
| Chillers | — | 1-HRZ001-L2-DV, 2-HRZ001-L-D[7] |
| Software | — | DSIE CP0148[7] |
| Gasbox | — | Peg/HRM[6] |
| EPD (End Point Detection) | — | No[6] |
| Vintage Year | — | 2006[5] |
| Vintage Year (alternate) | — | 2012[6] |
| SF6 | — | Purity 99.999%(5N)[5] |
| C4F8 | — | Purity 99.999%(5N)[5] |
| O2 | — | Purity 99.9995%(5N5)[5] |
| N2 | — | Purity 99.9995%(5N5)[5] |
| Ar | — | Purity 99.9995%(5N5)[5] |
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