Comparison ledger
Meyer Burger AK 800, Oxford Instruments 100 ICP Fluorine, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AK 800Meyer Burger | 100 ICP FluorineOxford Instruments |
|---|---|---|
| OEM | Meyer Burger | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Meyer Burger AK 800 | Oxford Instruments 100 ICP Fluorine |
| Specifications | ||
| 1. Magnetron head | Muegge 3kW | — |
| 8. Gas box | BCl3, Cl2, C4F8, CF4, CF3H, | — |
| 19. Dry pump | Ebara EV-S100P | — |
| 20. Dry Pump | Ebara EV-M202N- | — |
| Vintage | 2015 | — |
| Etch/Asher Vintage | 2015 | — |
| Etch Gases | — | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] |
| Cryo DRIE etch rate | — | up to 5 µm/min[1] |
| Wafer size | — | 4 inch, 6 inch, 8 inch (with clamp change)[1] |
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