Waferpedia

Comparison ledger

05 LHP 151versusNT-2000

Melles Griot 05 LHP 151, Wyko NT-2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMMelles GriotWyko
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Wyko NT-2000
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[1]—
Equipment typeLaser[1]—
MakeMelles Griot[1]—
Model05 LHP 151[1]—
Power stateDoes not power on[1]—
measurement type—non-contact surface metrology / optical profiling[3]
height measurement range—0.1 nm to several millimeters[3]
vertical resolution—as low as 0.1 nm[3]
automation—fully automated production version available; non-automated versions available for R&D[3]
motion/stage features—high speed auto focus, auto turret, and computer-controlled stage[3]
analysis capability—3-D surface analysis with powerful analysis software[3]
Measurement height range—0.1 nm to several millimeters[3]
Measurement type—non-contact surface metrology[3]
Automation—fully automated; high speed auto focus, auto turret, computer-controlled stage[3]
Precision—submicron precision[3]
Field of view—large field-of-view area measurements[3]
Qualification—gage-qualified instrument[3]
Configurations—non-automated versions available for R&D applications[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org