Comparison ledger
Lapmaster 12 Lapper, Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 LapperLapmaster | |
|---|---|---|
| OEM | Lapmaster | Yaskawa |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot |
| Specifications | ||
| Outside plate diameter | 12 inches[1] | — |
| Lapping Speed Range | 0 to 60 rpm[2] | — |
| Wafer Size Compatibility | 4 inches or smaller[1] | — |
| Input Voltage | 110 V[1] | — |
| Frequency | 60 Hz[1] | — |
| Phase | 1[1] | — |
| Number of Rings | 3[1] | — |
| Number of Weights | 3[1] | — |
| Includes Slurry System | Yes[1] | — |
| Includes Timer | Yes[1] | — |
| Configuration | — | With XU-CM6180 Controller, Compatible with Ebara FREX 300 CMP[3] |
| Model | — | XU RSM 53 E 0[3] |
| Equipment type | — | Atmospheric Wafer Robot[3] |
| Category | — | CMP[4] |
| Wafer size | — | 12 inch[3] |
| Controller | — | XU-CM6180 Controller[4] |
| Compatibility | — | Compatible with Ebara FREX 300 CMP[3] |