Comparison ledger
Lam Research Rainbow 4420 Polysilicon, Tegal 1511e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4420 PolysiliconLam Research | 1511eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | Cassette to Cassette Single Wafer Etcher | three- to six-inch wafers |
| Process node | — | — |
| Introduced | — | 1984 |
| Production run | — | 1984– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4420 | Tegal 1511e |
| Specifications | ||
| Wafer size | Cassette to Cassette Single Wafer Etcher[1] | — |
| Configuration | ESC[1] | — |
| tool type | — | tri-electrode dual-frequency plasma etch system[2] |
| wafer size | — | three- to six-inch wafers[2] |
| first sold | — | 1984[2] |
| system characteristic | — | first vacuum-loadlocked dual-frequency tri-electrode etch system[2] |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | — | Yes[2] |
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