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IPEC 472 01001 Automatic Waferversus120 Continuous

Lam Research IPEC 472 01001 Automatic Wafer, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
IPEC 472 01001 Automatic WaferLam Research
120 ContinuousLapmaster
OEMLam ResearchLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 472Lapmaster 120 Continuous
Specifications
Voltage208 VAC[1]—
Configuration50 Amp[1]—
Phase3 Phase[1]—
IPEC 472 01001 Automatic Wafer entry120 Continuous entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing