Waferpedia

Comparison ledger

.498 PSL WaferversusSupra 40 VP

KLA .498 PSL Wafer, Zeiss Supra 40 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
Supra 40 VPZeiss
OEMKLAZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferZeiss Supra 40 VP
Specifications
ConfigurationNIST Traceable[1]Coolstage (never used)[2]
NIST traceabilityYes[1]—
Lowest Coolstage Temp—-50 C Deg[2]
.498 PSL Wafer entrySupra 40 VP entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing