Comparison ledger
KLA .498 PSL Wafer, Wyko NT9100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT9100Wyko | |
|---|---|---|
| OEM | KLA | Wyko |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Wyko NT9100 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| Equipment type | — | Microscopy/Surface Analysis[2] |
| Capabilities | — | Optical profiles[2] |
| Objectives | — | 5X, 20X, 100X[2] |
| Vertical resolution | — | 0.1 nm[2] |
| Measurement mode | — | Non-contact surface metrology[2] |
| Measurement capability | — | Non-contact, three-dimensional, topography and film thickness[4] |
| Field-of-view multipliers | — | 0.55X, 0.75X, 1X, 1.5X, 2X[4] |
| Measurement array | — | 640 x 480, non-interlaced; optional 1392 x 1040 camera[4] |
| Light source | — | Long-lifetime green and white LEDs[4] |
| Optical assembly | — | Dual LED illuminator; three-position FOV turret, closed-loop, 10 mm scan[4] |
| Stages | — | Automated 100 mm Z-axis; ±6° tip/tilt stage; 100 mm XY manual stage standard; 150 mm XY auto stage optional[4] |
| Vertical measurement | — | 0.1 nm to 10 mm standard range[4] |
| Repeatability | — | 0.05 nm[4] |
| Vertical scan speed | — | User-selectable up to 24 μm/sec[4] |
| Optical resolution | — | 0.49 μm minimum[4] |
| Certification | — | CE, NRTL[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →