Waferpedia

Comparison ledger

.498 PSL WaferversusScientific FEI Strata 400 S STEM

KLA .498 PSL Wafer, Thermo Fisher Scientific FEI Strata 400 S STEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferThermo Fisher Scientific FEI Strata 400 S
Specifications
ConfigurationNIST Traceable[1]Type FP 2045/31[2]
NIST traceabilityYes[1]—
UHV Assy—51-1236-207 +24V = 50W[2]
Resolution at 5.9 keV—127eV[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing