Waferpedia

Comparison ledger

.498 PSL WaferversusXD 7500 VR

KLA .498 PSL Wafer, Nordson XD 7500 VR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
XD 7500 VRNordson
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferNordson XD 7500 VR
Cited variants—
  • XD7500VR Jade FP[1]
Specifications
ConfigurationNIST Traceable[2]—
NIST traceabilityYes[2]—
Manufacturer—Nordson[1]
Category—Metrology & Inspection[1]
Model—XD 7500 VR[1]
Alternate model designation—XD7500VR Jade FP[3]
X-ray tube type—Open microfocus transmission tube[4]
Operating voltage range—30–160 kV[3]
Minimum focal spot size—0.95 µm[4]
Feature resolution—950 nm (0.95 µm)[3]
Geometric magnification—Up to 1200×[4]
Maximum system magnification—5650×[4]
System magnification—Up to 4200×[3]
Detector—1.3 MP Digital CCD image receptor[4]
Detector resolution—1.33 MP[3]
Tilt range—±70° (140° total)[4]
Rotation—360°[4]
Maximum sample dimensions—508 mm × 444 mm[4]
Maximum sample weight—5 kg[4]
System weight—1900 kg[4]
Display—20.1″ DVI digital color LCD (1600 × 1200 pixels)[4]
Max. sample dimensions—508 mm × 444 mm[4]
Max. sample weight—5 kg[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]instrumenthive.cominstrumenthive.com
  4. [4]instrumenthive.cominstrumenthive.com