Waferpedia

Comparison ledger

.498 PSL WaferversusVMR 6555 CCD (Charge-Coupled Device) Camera

KLA .498 PSL Wafer, Nikon VMR 6555 CCD (Charge-Coupled Device) Camera, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferNikon VMR
Specifications
ConfigurationNIST Traceable[1]Black and White[2]
NIST traceabilityYes[1]—
Type—CCD (Charge-Coupled Device) Camera[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing