Waferpedia

Comparison ledger

.498 PSL WaferversusSMZ-1

KLA .498 PSL Wafer, Nikon SMZ-1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SMZ-1Nikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferNikon SMZ-1
Cited variants—
Specifications
ConfigurationNIST Traceable[4]—
NIST traceabilityYes[4]—
Type—Binocular microscope[3]
Location—Z09[3]
Microscope type—Binocular stereoscopic microscope[1]
Inventory category—Binocular Model[3]
Location listing—Z09[3]
Head Type—Binocular[5]
Eyepieces—10x/22mm eyepieces[5]
Zoom Range—0.7x - 3.0x[5]
Total Magnification—7x - 30x[5]
Stand Type—Plain Stand[5]
Eyepiece Inclination (SMZ-I, SMZ-I ESD)—30° off vertical[2]
Eyepiece Inclination (SMZ-IB, SMZ-IB ESD)—45° off vertical[2]
Eyepiece magnification—10x/22mm[5]
Stand—Plain stand[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]manualslib.commanualslib.com
  3. [3]epfl.chepfl.ch
  4. [4]inventory listing
  5. [5]microscopecentral.commicroscopecentral.com