Waferpedia

Comparison ledger

.498 PSL WaferversusNS300

KLA .498 PSL Wafer, Malvern Panalytical NS300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NS300Malvern Panalytical
OEMKLAMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferMalvern Panalytical NS300
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Measurement technique—Nanoparticle Tracking Analysis (NTA)[2]
Particle size range—30 to 800 nm[2]
Particle concentration range—10^6 to 10^9 particles/mL[2]
Laser wavelength—532 nm[2]
Temperature range—20 to 50 C[2]
Sample volume required—~1 mL[2]
Microscope magnification—20X[2]
Camera frame rate—30 frames per second[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]cnfusers.cornell.educnfusers.cornell.edu