Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan 6420 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1995 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan 6420 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Single Phase[2] |
| NIST traceability | Yes[1] | — |
| Voltage | — | 220 V[2] |
| Frequency | — | 50 Hz[2] |
| Product type | — | Particle Defect System[2] |
| Manufacturer | — | KLA[2] |
| Electrical input | — | 220 V, 50 Hz, single phase, 16 A[2] |
| Alternative electrical input | — | Single phase, 60 Hz[3] |
| Vintage | — | 1995[2] |
| Phase | — | Single Phase[2] |
| Current | — | 16 A[2] |
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