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.498 PSL WaferversusILM 2139 Patterned Wafer

KLA .498 PSL Wafer, KLA ILM 2139 Patterned Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
ILM 2139 Patterned WaferKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA ILM 2139 Patterned Wafer
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[2]
NIST traceabilityYes[1]—
Voltage—208 V[2]
Phase—3 phase[2]
Current—15 A[2]
Vintage—2000[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing