Comparison ledger
KLA .498 PSL Wafer, KLA Candela CS 20 V, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Candela CS 20 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[2] |
| NIST traceability | Yes[1] | — |
| Voltage | — | 230 VAC[2] |
| Phase | — | 3 Phase[2] |
| Chuck | — | 2-5"[3] |
| Wafer sizes | — | 4-inch and 6-inch[4] |
| Chuck sizes | — | 4-inch and 6-inch[4] |
| Software vs | — | Candela Wafer Version 6.8 Build 16[4] |
| Laser specs | — | 405 nm oblique-incidence laser and 660 nm normal-incidence laser[4] |
| Laser wavelength (oblique incidence) | — | 405 nm[4] |
| Laser wavelength (normal incidence) | — | 660 nm[4] |
| Software version | — | Candela Wafer Version 6.8 Build 16[4] |
| Power input (variant 1) | — | 230 VAC, 50/60 Hz, 3-phase[2] |
| Power input (variant 2) | — | 50/60 Hz, 1-phase[3] |
| Wafer size (6-inch) | — | 6 inch[3] |
| Supported wafer sizes | — | 4 inch and 6 inch[4] |
| Chuck size range | — | 2-5 inch[3] |
| Power voltage | — | 230 VAC[2] |
| Power frequency | — | 50/60 Hz[2] |
| Power phase (option 1) | — | 3 Phase[2] |
| Power phase (option 2) | — | 1 Phase[3] |
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