Comparison ledger
KLA .498 PSL Wafer, KLA Candela CS 10 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Candela CS 10 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Single Phase[3] |
| NIST traceability | Yes[2] | — |
| Make | — | KLA[3] |
| Model | — | Candela CS 10[3] |
| Equipment type | — | Surface Inspection System[3] |
| Phase | — | Single Phase[3] |
| Frequency | — | 50/60 Hz[3] |
| Vintage | — | 2005[3] |
| Wafer sizes | — | 3 inch[4] |
| Description name | — | KLA-Tencor Candela CS-10 Surface Analyzer Candela[5] |
| Voltage | — | 230 V AC[5] |
| Current | — | 5 A[5] |
| Maximum AC | — | 10 K[5] |
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