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.498 PSL Waferversus6200

KLA .498 PSL Wafer, KLA 6200, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
6200KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—25 Wafer Slot Cassette
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA 6200
Specifications
ConfigurationNIST Traceable[1]Scan Stage[2]
NIST traceabilityYes[1]—
Wafer size—25 Wafer Slot Cassette[2]
Process—Vac 23 InHg[2]
Inlet Power—1 line of 208 Vac, 15 amp[2]
Voltage—208 V[3]
Frequency—60 Hz[3]
Cassette capacity—25 wafer slots[2]
Process vacuum—23 InHg[2]
Exhaust—Blower for laser cooling[2]
Power requirement—208 Vac, 15 amp[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing