Waferpedia

Comparison ledger

.204 PSL WaferversusStereo

KLA .204 PSL Wafer, Zeiss Stereo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
StereoZeiss
OEMKLAZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferZeiss Stereo
Cited variants—
  • SteREO Discovery.V8[1]
  • SteREO Discovery.V12[2]
  • SteREO Discovery.V20[3]
  • Stemi 355[2]
  • Stemi 508[2]
  • Axio Zoom.V16[2]
Specifications
ConfigurationNIST Traceable[4]—
Wafer Size8 inch[4]—
TraceabilityNIST[5]—
Compatible ToolsSurfscan 6xy0, Sp1[4]—
NIST TraceableYes[4]—
Microscope type—Stereo microscope[6]
Manufacturer—Zeiss[6]
Product family—Stereo and Zoom Microscopes[2]
Image output—Three-dimensional and laterally precise images[2]
Use case—Observe large samples such as leaves and tissues; inspect rough material surfaces[2]
Zoom range—8:1 to 20:1 across the SteREO Discovery family; SteREO Discovery.V8 has 8:1 zoom and SteREO Discovery.V20 has motorized 20x zoom[2]
SteREO Discovery.V8 zoom—8:1 zoom (1.0x ... 8.0x) manually operable on both sides with switchable click stops[1]
SteREO Discovery.V8 mount diameter—76 mm[1]
SteREO Discovery.V8 objective option—Objective Achromat S 0.63x FWD 107 mm[1]
SteREO Discovery.V8 stand option—Stand M LED with integrated power unit and transillumination units retrofittable[1]
SteREO Discovery.V20 zoom—20:1 zoom range[3]
SteREO Discovery.V20 control—SYCOP touch panel[3]
SteREO Discovery.V20 performance—Up to 345x total magnification[3]
SteREO Discovery.V20 resolution—Up to 1000 LP/mm maximum resolution[3]
Zoom range (SteREO Discovery.V8)—8:1[7]
Maximum total magnification (SteREO Discovery.V8)—Up to 300x (with PlanApo S 1.5x and W 25x/10 eyepiece)[7]
Working distance range (SteREO Discovery.V8)—28 mm to 253 mm depending on objective[7]
Illumination (SteREO Discovery.V8)—Cold light and LED illumination options[7]
Optical system (SteREO Discovery.V8)—Apochromatic stereo telescope system with 76 mm mount diameter[1]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]micro-shop.zeiss.commicro-shop.zeiss.com
  2. [2]zeiss.comzeiss.com
  3. [3]zeiss.comzeiss.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]Equipment inventory listing
  7. [7]asset-downloads.zeiss.comasset-downloads.zeiss.com