Waferpedia

Comparison ledger

.204 PSL WaferversusUX50

KLA .204 PSL Wafer, YXLON UX50, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
UX50YXLON
OEMKLAYXLON
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferYXLON UX50
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
inspection type—CT inspection system[3]
use environment—production environments[3]
target parts—large and dense parts[3]
operation—easy and ergonomic operation[3]
detector flexibility—flat-panel and/or line detector[3]
CT technologies—cone-beam and fan-beam scans; circular and helical CT; horizontal and vertical field-of-view extensions[3]
image quality features—metal artifact reduction and ScatterFix[3]
inspection envelope—exceptional inspection envelope[4]
output—2D and 3D results in record time[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org