Waferpedia

Comparison ledger

.204 PSL WaferversusNT 9800 Optical

KLA .204 PSL Wafer, Veeco NT 9800 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAVeeco
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferVeeco NT 9800
Specifications
ConfigurationNIST Traceable[1]Single Phase[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Instrument type—Optical Interferometric Profiler[4]
Product line—Metrology & Instrumentation[4]
Electrical phase—Single Phase[3]
Frequency—50/60 Hz[3]
Voltage—115/230 V[3]
Power rating—375 VA[3]
Stated vintage—2010[3]
Equipment type—Optical profilometer[3]
Alternate model name—Wyko NT9800 Optical Profiler[4]
Model—NT 9800[3]
Make—Veeco / Wyko[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org