Comparison ledger
KLA .204 PSL Wafer, Sonoscan D 9600 C-SAM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D 9600 C-SAMSonoscan | |
|---|---|---|
| OEM | KLA | Sonoscan |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Sonoscan D 9600 C-SAM |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| AC Voltage | — | 100–240 V, 50–60 Hz[3] |
| FLA | — | 11.3 A[3] |
| Largest Load | — | 8.33 A[3] |
| Main O/C | — | 15 A[3] |
| SCCR | — | 5 kA[3] |
| Phase | — | Single[3] |
| Wiring | — | 2‑wire + Ground[3] |
| Operator Manual | — | A600158[3] |
| Service Manual | — | A600159[3] |
| Frequency | — | 50–60 Hz[3] |
| 25 MHz F2 Transducer | — | 0.50 inch (12.7 mm) focal length[3] |
| 50 MHz F2 Transducer | — | 0.50 inch (12.7 mm) focal length[3] |
| 50 MHz F3 Transducer | — | 0.75 inch (19.1 mm) focal length[3] |
| Low-Frequency Pulse Transducer | — | 0.500 inch focal length, SK 230/LP, 2019 vintage[3] |
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