Comparison ledger
KLA .204 PSL Wafer, Nikon SMZ-1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SMZ-1Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon SMZ-1 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[4] | — |
| Wafer Size | 8 inch[4] | — |
| Traceability | NIST[5] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[4] | — |
| NIST Traceable | Yes[4] | — |
| Type | — | Binocular microscope[3] |
| Location | — | Z09[3] |
| Microscope type | — | Binocular stereoscopic microscope[1] |
| Inventory category | — | Binocular Model[3] |
| Location listing | — | Z09[3] |
| Head Type | — | Binocular[6] |
| Eyepieces | — | 10x/22mm eyepieces[6] |
| Zoom Range | — | 0.7x - 3.0x[6] |
| Total Magnification | — | 7x - 30x[6] |
| Stand Type | — | Plain Stand[6] |
| Eyepiece Inclination (SMZ-I, SMZ-I ESD) | — | 30° off vertical[2] |
| Eyepiece Inclination (SMZ-IB, SMZ-IB ESD) | — | 45° off vertical[2] |
| Eyepiece magnification | — | 10x/22mm[6] |
| Stand | — | Plain stand[6] |
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