Waferpedia

Comparison ledger

.204 PSL WaferversusEclipse L 200 N Optical

KLA .204 PSL Wafer, Nikon Eclipse L 200 N Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferNikon Eclipse L 200
Specifications
ConfigurationNIST Traceable[1]16M Pixel Camera[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Camera—16M Pixel[4]
Vintage—2016[3]
Air Table—Not Included[4]
Camera Resolution—16 Megapixels[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com