Comparison ledger
KLA .204 PSL Wafer, KLA INS 3000 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Universal wafer handler |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1999 Vintage · 2000 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA INS 3000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Power Console with Emergency Stop Switch[3] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Some Missing Parts | — | Lamp House, Observation Tube, Ass'y & Eyepieces, PreAligner Chuck[3] |
| Pre aligner chuck | — | 10 mm[4] |
| Wafer size | — | Universal wafer handler[5] |
| Microscope | — | Fully automatic integrated including UV and confocal[5] |
| Wafer handler | — | Universal[5] |
| Cassette loading | — | 1-3 front loading, SMIF compatible[5] |
| User interface | — | Windows NT based graphical user interface[5] |
| Construction | — | All stainless steel[6] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →