Comparison ledger
KLA 1007, Tokyo Electron Precio Nano, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Precio NanoTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | Auto Alignment System (Needle Tip, Wafer) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron Precio |
| Specifications | ||
| Manufacturer | KLA[1] | Tokyo Electron[4] |
| Model | 1007[1] | Precio Nano[4] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | Auto Alignment System (Needle Tip, Wafer)[3] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | PSAS (Precio Standard Application Software)[3] |
| Loader | — | Single/Wide/Opener/Right[3] |
| Chuck Top | — | HOT[3] |
| Chuck Force | — | 300 kg[3] |
| WAPP | — | STD (1 plate)[3] |
| PTD (Probe Tip Detector) | — | 150C[3] |
| GPIB | — | I/F w/Cable 4m[3] |
| OCR (Wafer ID) | — | FOCUS[3] |
| LCD Panel | — | WAGON[3] |
| Category | — | Test & Probe[4] |
| Wafer size / system type | — | Auto Alignment System (Needle Tip, Wafer)[4] |
| Probing accuracy | — | ±0.8 µm[5] |
| Probing force | — | 300/400 kg[5] |
| Optical system | — | ASU/BCU-Ⅱ[5] |
| PSAS | — | Precio Standard Application Software[3] |
| Chuck camera unit | — | Chuck Camera Unit -II[3] |
| Bridge camera unit | — | Bridge Camera Unit -II[3] |
| Alarm monitor | — | Alarm Monitor[3] |
| Real-time wafer map display | — | Real Time Wafer Map Display[3] |
| Inspections | — | Auto/Manual, Probe Mark/Needle Tip[3] |
| Base DD head plate | — | 480 SQ[3] |
| PTD | — | 150C[3] |
| OCR | — | FOCUS[3] |
| Software version | — | Nzz00-P016.12-A[3] |
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