Comparison ledger
KLA 1007, Tokyo Electron P 12 XLn, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | P 12 XLnTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron P 12 |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | KLA[3] | — |
| Model | 1007[3] | P 12 XLn[5] |
| Description | Wafer Prober[3] | — |
| Wafer size | 150 mm[3] | — |
| Convertible to 8 inch wafer size | Yes[3] | — |
| Vintage | 01.06.1995[3] | 2005[5] |
| Make | KLA[4] | Tel[5] |
| Equipment type | Prober[4] | Prober[1] |
| Configuration | — | 50/60 Hz[5] |
| Rated Breaker Input | — | 30 A[5] |
| Ampere Interrupt Capacity | — | 35 kA[5] |
| Rated Power Input | — | 208 V, 50/60 Hz[6] |
| 12 | — | Nickel Chuck Top[2] |
| Temp | — | -40 ~ 150 C[1] |
| Frequency | — | 50/60 Hz[5] |
| Wafer sizes | — | 8, 12 inch[1] |
| Power input | — | 208 V, 50/60 Hz[6] |
| Application note | — | May be used for memory[6] |
| Hot temp controller | — | Included[2] |
| GPIB interface | — | Included[2] |
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