Waferpedia

Comparison ledger

1007versusP 12 XL Wafer

KLA 1007, Tokyo Electron P 12 XL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
P 12 XL WaferTokyo Electron
OEMKLATokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Tokyo Electron P 12
Specifications
ManufacturerKLA[1]—
Model1007[1]P 12 XL[4]
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]Tel[4]
Equipment typeProber[2]—
Configuration—Fully Automatic[3]
Phase—1 Phase[3]
Voltage—100 Vac[3]
Wafer Size—12 inch[3]
Automation—Fully Automatic[3]
Chuck—Gold Chuck Ambient / Hot[3]
Frequency—50/60 Hz[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing