Comparison ledger
KLA 1007, SUSS MicroTec PA 200 HS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | PA 200 HSSUSS MicroTec |
|---|---|---|
| OEM | KLA | SUSS MicroTec |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | SUSS MicroTec PA 200 |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | KLA[2] | SUSS MicroTec[5] |
| Model | 1007[2] | PA 200 HS[5] |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | — |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | 2006[4] |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Configuration | — | With Vibration Isolation Table[4] |
| Category | — | Test & Probe[5] |
| Wafer sizes | — | 4 in, 6 in[4] |
| With vibration isolation table | — | Yes[4] |
| Unique Z-profiling function | — | Yes[4] |
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