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Comparison ledger

1007versusNSR 2205 i 12 D

KLA 1007, Nikon NSR 2205 i 12 D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLANikon
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Nikon NSR 2205
Specifications
ManufacturerKLA[1]Nikon[3]
Model1007[1]NSR 2205 i 12 D[3]
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]Nikon[3]
Equipment typeProber[2]—
Software Version—MCSV 2.41, OCSV 2.41[3]
CIM—SECS[3]
Handler System—WL Type 3[3]
Factory interface—Open Cassette[3]
Factory Interface—Open Cassette (2)[4]
Configuration—Vax Station, Pin Chuck[4]
Wafer Size—8 inch[3]
CIM Interface—SECS[3]
Wafer Sizes—6 inch / 8 inch[3]
Additional Features—Vax Station, Pin Chuck[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing