Comparison ledger
KLA 1.112 PSL Wafer, Zygo Nexview NX 2 Optical Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Zygo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zygo Nexview NX 2 Optical Surface |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Objectives | — | 1.0X – 100X magnification; Standard and long working distance[3] |
| Measurement Array | — | Selectable 1600 x 1200, 1000 x 1000,1000 x 600, 1000 x 200[3] |
| Part Viewing | — | Selectable Monochrome and Color imaging with available fringe-free viewing mode[3] |
| Z-Drive (Focus) Stage | — | 100 mm range with 0.1 μm resolution[3] |
| Part Stage | — | Motorized stage travel range:[3] |
| XY | — | 200 mm or 200x325mm[3] |
| Tilt | — | ±4[3] |
| Objective Mounting Options | — | Single objective dovetail; Manual Encoded 4-position turret; Motorized 4-position turret[3] |
| Optical Zoom | — | Motorized 3-position encoded zoom - 0.5X, 1.0X, 2.0X included; 0.75X, 1.5X optional[3] |
| Field of View | — | 0.04 x 0.04 mm to 17.49 x 17.49 mm, selectable by objective and zoom; integrated field stitching[3] |
| Illuminator | — | Proprietary solid-state white light source with software-selectable field stop, aperture stop and spectral filters[3] |
| Focus | — | Motorized manual or auto focus with through-the-lens focus aid[3] |
| Part Stage XY travel | — | 200 mm or 200×325 mm[3] |
| Part Stage Tilt | — | ±4°[3] |
| Encoded XYZ stage (optional) | — | 200×200×100 mm[3] |
| Vertical Scan Range (piezo) | — | 150 μm[3] |
| Vertical Scan Range (extended) | — | 20 mm[3] |
| Surface Topography Repeatability | — | 0.06 nm[3] |
| Repeatability of RMS | — | 0.005 nm[3] |
| Optical Lateral Resolution (100X objective) | — | 0.34 μm[3] |
| Spatial Sampling (100X objective, 2X zoom) | — | 0.04 μm[3] |
| Input Voltage | — | 100 to 240 VAC, 50/60 Hz[3] |
| Compressed Air for Table | — | 4.1 to 5.5 bar (60 to 80 psi), dry and filtered; 6 mm OD hose input, ¼ in.[3] |
| Vacuum | — | Optional connection for 6 mm hose[3] |
| System Controller | — | i7 class PC with 27 in. 1080P display[3] |
| Software | — | ZYGO Mx software running under Microsoft Windows 10 (64-bit)[3] |
| Vintage | — | 2014[3] |
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