Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Nova NanoLab 200 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual Beam Ga FIB[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Process | — | PFA FIB Cut[3] |
| Last PM on Oct 2023 | — | Tool Functional, Performance within PM Spec[3] |
| PC System | — | Windows XP[3] |
| GIS Components | — | XeF2 & Pt Coating Probes[3] |
| Last PM | — | Oct 2023[3] |
| Functional status | — | Tool Functional, Performance within PM Spec[3] |
| SE Detectors | — | Two SE Detectors[3] |
| BSE Detector | — | No BSE Detector[3] |
| EDS | — | No EDS[3] |
| HDD | — | Does not come with HDD[3] |
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