Comparison ledger
KLA 1.112 PSL Wafer, Sonoscan D 9000 C-SAM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D 9000 C-SAMSonoscan | |
|---|---|---|
| OEM | KLA | Sonoscan |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Sonoscan D 9000 C-SAM |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hhz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Phase | — | 1 Phase[3] |
| Power Supply | — | 1 Phase, 50/60 Hz, 115 VAC, 15 A[3] |
| Year of Manufacture (Listed Vintage) | — | 2004[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →