Waferpedia

Comparison ledger

1.112 PSL WaferversusXD 7600 NT

KLA 1.112 PSL Wafer, Nordson XD 7600 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
XD 7600 NTNordson
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferNordson XD 7600 NT
Specifications
ConfigurationNIST Traceable[1]Includes HDD and Software[3]
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Operating System—Windows XP[3]
Phase—1 Phase[4]
X-ray tube type—Sealed-transmissive (NT100)[5]
X-ray tube max voltage—160 kV[6]
X-ray tube power—10 W[5]
Feature recognition resolution—< 0.1 µm[6]
Detector—χiDAT3 Digital Image Intensifier, 2 MP @ 25 fps[6]
Geometric magnification—2,000×[6]
System magnification—12,000×[6]
Total digital zoom magnification—60,000×[6]
Max sample dimensions—736 mm × 580 mm (29″ × 22.8″)[6]
Tilt capability—Up to 70° at constant magnification[6]
Display—Dual 24″ TFT LCD Monitors[6]
Active X-ray Image Stabilization (AχiS)—Standard[6]
Power—Single Phase 200-230Vac, 16A, 50/60 Hz[5]
Max power consumption—1000 W[5]
System weight—1950 kg (4300 lbs)[5]
Equipment type—X-ray inspection system[3]
Category—Metrology & Inspection[7]
Feature recognition—below 0.1 µm[7]
Includes—HDD and Software[3]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]cohpros.comcohpros.com
  6. [6]instrumenthive.cominstrumenthive.com
  7. [7]waferpedia.comwaferpedia.com