Comparison ledger
KLA 1.112 PSL Wafer, KLA Candela CS 920 Surface Analyzer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Includes PSC Calibration Wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Candela |
| Specifications | ||
| Configuration | NIST Traceable[1] | 3 Wires[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Wafer size | — | Includes PSC Calibration Wafer[3] |
| Phase | — | 1 Phase[3] |
| Voltage | — | 230 V[3] |
| Manufacturer | — | KLA[3] |
| Model | — | Candela CS 920[3] |
| Equipment type | — | Surface Analyzer[3] |
| Included item | — | PSC Calibration Wafer[3] |
| Electrical configuration | — | 1 phase, 3 wires, 230 V, 20 A, 50/60 Hz[3] |
| Vintage | — | 2014[3] |
| Wafer size range | — | 4" to 6"[4] |
| Software version | — | 10.2.4.0101[4] |
| Handler | — | Does not have a handler[4] |
| Operating state | — | Tool powers on and initializes[4] |
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