Waferpedia

Comparison ledger

0035235-003 MMD HeadversusAxio

KLA 0035235-003 MMD Head, Zeiss Axio, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
AxioZeiss
OEMKLAZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadZeiss Axio
Cited variants—
  • Axio Imager[1]
  • Axio Imager Z2[2]
  • Axio Observer[2]
  • Axio Observer Z1[2]
  • Axio Scope.A1[3]
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[4]with Axiocam MRC camera[5]
Model0035235-003[4]—
MakeKLA[4]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[4]—
Compatible SystemKLA AIT-XP[4]—
Observation methods—brightfield, darkfield[3]
Objectives—5x, 10x, 20x, 50x, 100x, 150x[3]
Software—Zen 2.3 Lite[3]
Camera—Axiocam MRC[5]
Tall sample accommodation—custom adjustable armature[3]
Manual controls—objective turret, XY stage, focusing[3]
Type—optical microscope[3]
Available objectives—5x, 10x, 20x, 50x, 100x, 150x[3]
Imaging software—Zen 2.3 Lite[3]
Stage and controls—Manual objective turret, XY stage and focusing[3]
Sample height capacity—Tall samples can be accommodated[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]udnf.udel.eduudnf.udel.edu
  2. [2]microscopy.duke.edumicroscopy.duke.edu
  3. [3]uwaterloo.cauwaterloo.ca
  4. [4]inventory listing
  5. [5]inventory listing