Comparison ledger
KLA 0035235-003 MMD Head, Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Nova NanoLab 200 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | Dual Beam Ga FIB[2] |
| Model | 0035235-003[1] | — |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Process | — | PFA FIB Cut[2] |
| Last PM on Oct 2023 | — | Tool Functional, Performance within PM Spec[2] |
| PC System | — | Windows XP[2] |
| GIS Components | — | XeF2 & Pt Coating Probes[2] |
| Last PM | — | Oct 2023[2] |
| Functional status | — | Tool Functional, Performance within PM Spec[2] |
| SE Detectors | — | Two SE Detectors[2] |
| BSE Detector | — | No BSE Detector[2] |
| EDS | — | No EDS[2] |
| HDD | — | Does not come with HDD[2] |
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